发明名称 |
POSITIONING INSTRUMENT FOR ABRASIVE PAD |
摘要 |
PROBLEM TO BE SOLVED: To provide a positioning instrument for an abrasive pad for easily attaching an abrasive pad to an appropriate position on a surface plate.SOLUTION: The positioning instrument comprises: a reference part 12 which uses an outer peripheral end of an abrasive pad as a reference for arrangement; and a contact part 11 arranged at a position allowing contact with the outer peripheral end of a surface plate concentric or substantially concentric with the abrasive pad in a state where the outer peripheral end of the abrasive pad is arranged with reference to the reference part 12. |
申请公布号 |
JP2015226962(A) |
申请公布日期 |
2015.12.17 |
申请号 |
JP20140114129 |
申请日期 |
2014.06.02 |
申请人 |
MICRON TECHNOLOGY INC;NITTA HAAS INC |
发明人 |
KAWAHIRA HIRONAGA;MATSUMURA SHINICHI |
分类号 |
B24B37/34;H01L21/304 |
主分类号 |
B24B37/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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