发明名称 POSITIONING INSTRUMENT FOR ABRASIVE PAD
摘要 PROBLEM TO BE SOLVED: To provide a positioning instrument for an abrasive pad for easily attaching an abrasive pad to an appropriate position on a surface plate.SOLUTION: The positioning instrument comprises: a reference part 12 which uses an outer peripheral end of an abrasive pad as a reference for arrangement; and a contact part 11 arranged at a position allowing contact with the outer peripheral end of a surface plate concentric or substantially concentric with the abrasive pad in a state where the outer peripheral end of the abrasive pad is arranged with reference to the reference part 12.
申请公布号 JP2015226962(A) 申请公布日期 2015.12.17
申请号 JP20140114129 申请日期 2014.06.02
申请人 MICRON TECHNOLOGY INC;NITTA HAAS INC 发明人 KAWAHIRA HIRONAGA;MATSUMURA SHINICHI
分类号 B24B37/34;H01L21/304 主分类号 B24B37/34
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