发明名称 |
Container Cleaning Device |
摘要 |
A container cleaning device includes a mounting plate shaped for accommodating a wafer; and a nozzle assembly disposed on the mounting plate and including a base and a shell complimentarily disposed on the base. The shell includes an inlet and at least one outlet member disposed on an edge. The base includes a recess communicating with the inlet, and at least one outlet element each being inclined at a predetermined angle with respect to the shell. Each outlet member of the shell is adjacent to and communicates with the corresponding outlet element of the base. |
申请公布号 |
US2015360266(A1) |
申请公布日期 |
2015.12.17 |
申请号 |
US201514727954 |
申请日期 |
2015.06.02 |
申请人 |
Lai Chun-Liang |
发明人 |
Lai Chun-Liang |
分类号 |
B08B9/093;B05B1/02 |
主分类号 |
B08B9/093 |
代理机构 |
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代理人 |
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主权项 |
1. A container cleaning device comprising:
a mounting plate shaped for accommodating a wafer; and a nozzle assembly disposed on the mounting plate and including a base and a shell complimentarily disposed on the base; wherein the shell includes an inlet and at least one outlet member disposed on an edge; wherein the base includes a recess communicating with the inlet, and at least one outlet element each being inclined at a predetermined angle with respect to the shell; and wherein each of the at least one outlet member of the shell is adjacent to and communicates with each of the at least one outlet element of the base. |
地址 |
Zhubei City TW |