发明名称 Container Cleaning Device
摘要 A container cleaning device includes a mounting plate shaped for accommodating a wafer; and a nozzle assembly disposed on the mounting plate and including a base and a shell complimentarily disposed on the base. The shell includes an inlet and at least one outlet member disposed on an edge. The base includes a recess communicating with the inlet, and at least one outlet element each being inclined at a predetermined angle with respect to the shell. Each outlet member of the shell is adjacent to and communicates with the corresponding outlet element of the base.
申请公布号 US2015360266(A1) 申请公布日期 2015.12.17
申请号 US201514727954 申请日期 2015.06.02
申请人 Lai Chun-Liang 发明人 Lai Chun-Liang
分类号 B08B9/093;B05B1/02 主分类号 B08B9/093
代理机构 代理人
主权项 1. A container cleaning device comprising: a mounting plate shaped for accommodating a wafer; and a nozzle assembly disposed on the mounting plate and including a base and a shell complimentarily disposed on the base; wherein the shell includes an inlet and at least one outlet member disposed on an edge; wherein the base includes a recess communicating with the inlet, and at least one outlet element each being inclined at a predetermined angle with respect to the shell; and wherein each of the at least one outlet member of the shell is adjacent to and communicates with each of the at least one outlet element of the base.
地址 Zhubei City TW
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