| 摘要 |
The present invention suitably acquires information relating to a magnetization direction change in various samples. A scanning electron microscope (500) is provided with: an electron beam spiral wave irradiation unit (502), which generates electron beam spiral waves (503), and which changes an irradiation position of the electron beam spiral waves (503) with respect to a sample (504) on a sample stage (505); and a control unit (510) that controls the irradiation position where the sample (504) is to be irradiated with the electron beam spiral waves (503), said electron beam spiral waves being radiated from an electron beam spiral wave source. |
