OPTICAL FILTER DEVICE, OPTICAL MODULE, ELECTRONIC EQUIPMENT, AND METHOD FOR MANUFACTURING OPTICAL FILTER DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an optical filter device capable of suppressing reduction in resolution of an interference filter, an optical module, electronic equipment, and a method for manufacturing an optical filter device.SOLUTION: An optical filter device 600 includes: a wavelength-variable filter 5 including substrates (a fixed substrate and a movable substrate); a base 620; a first fixing member 640 that is disposed in a portion at an end of the substrates in a plan view observed in a thickness direction of the substrates and that fixes the wavelength-variable interference filter 5 to the base 620; and a second fixing member 641 that fixes the wavelength-variable interference filter 5 to the base 620 at a position where an amplitude of vibrations is the largest in the wavelength-variable interference filter 5 having the above portion at the substrate end as a fixed end, and that has lower rigidity than that of the first fixing member 640.