| 摘要 |
PROBLEM TO BE SOLVED: To facilitate designing a sensor for realizing the prevention of the adhesion of a foreign object onto a diaphragm in response to a way of a flow of a pressure medium or the type of the pressure medium by clearly assuming a foreign object adhesion region in a concave portion for forming the diaphragm.SOLUTION: A pressure sensor device comprises a sensor chip 2 configured so that a concave portion 21b is formed in one surface 2a, thereby forming a bottom 21c of the concave portion 21b into a diaphragm 21a including a pressure detection function and acting as a thin portion, the diaphragm 21a is exposed to a pressure medium in the concave portion 21b, thereby detecting a pressure, the bottom 21c of the concave portion 21b acts as a liquid-repellent surface by forming a liquid-repellent film 81 by coating treatment, and sidewall portions 21d of the concave portion 21b acts as lyophilic surfaces by forming a lyophilic film 82 by coating treatment. |
