MANUFACTURING LINE FOR SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

摘要

A manufacturing line for a semiconductor device according to the invention is a manufacturing line for manufacturing a semiconductor device by circulating a workpiece along a conveyance route on which a plurality of treatment devices are arranged. The conveyance route includes a first route on which the treatment devices with a large number of times of treatment are arranged, and a second route on which the treatment devices with a small number of times of treatment are arranged. Besides, the conveyance route makes a changeover between the conveyance of the workpiece that has moved along the first route to the first route in a continuous manner, and the conveyance of the workpiece that has moved along the first route to the second route.

主权项

1. A manufacturing line for a semiconductor device, comprising:
a conveyance route on which a plurality of treatment devices are arranged, wherein a workpiece is circulated along the conveyance route on which the plurality of the treatment devices are arranged, the conveyance route includes a first route on which a plurality of the treatment devices that subject the workpiece to predetermined treatments are arranged, and a second route on which a plurality of the treatment devices are arranged, the number of times of treatment of the treatment devices that are arranged on the second route being larger than the number of times of treatment of the treatment devices that are arranged on the first route, and the conveyance route makes a changeover between conveyance of the workpiece that has moved along the second route to the second route in a continuous manner and conveyance of the workpiece that has moved along the second route to the first route.