发明名称 |
PHOTOSENSITIVE COMPOSITION, PHOTOCURABLE COMPOSITION, CHEMICAL AMPLIFICATION RESIST COMPOSITION, RESIST FILM, PATTERN FORMING METHOD, METHOD OF MANUFACTURING ELECTRONIC DEVICE AND ELECTRONIC DEVICE |
摘要 |
There is provided a photosensitive composition containing a compound represented by Formula (I), and the Formula (I) is defined as herein,;;and chemical amplification resist composition containing the photosensitive composition, wherein the photosensitive composition further contains a compound capable of generating an acid upon irradiation with an actinic ray or radiation, and a chemical amplification resist composition containing the photosensitive composition, wherein the photosensitive composition further contains a compound capable of generating an acid upon irradiation with an actinic ray or radiation. |
申请公布号 |
US2015362836(A1) |
申请公布日期 |
2015.12.17 |
申请号 |
US201514831801 |
申请日期 |
2015.08.20 |
申请人 |
FUJIFILM CORPORATION |
发明人 |
TSUCHIMURA TOMOTAKA;SAKITA KYOUHEI |
分类号 |
G03F7/004;G03F7/038;C07D413/12;G03F7/32;C07D277/64;C07D277/84;G03F7/039;G03F7/20 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
1. A photosensitive composition containing a compound represented by the following Formula (I): in Formula (I), Y represents a monovalent organic group, R1 represents a monovalent organic group, each of R2 and R2′ independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, or a heteroaryl group, and R2 and R2′ may be bound with each other to form a nitrogen-containing heterocyclic group. |
地址 |
TOKYO JP |