Linear Deposition Apparatus with Modular Assembly

摘要

Embodiments relate to an injection module assembly (IMA) including a body and replaceable injectors installed in a module block. Each of the injectors includes a protruding leg that is received in a support hole formed in the module block. The protruding leg provides support for the injector while an end block at an opposite end of the injector is secured to the module block. The end block and the protruding leg enable convenient mounting or removal of the module.

主权项

1. A replaceable injector, comprising:
an elongated body formed with a passage and an injection port formed along a longitudinal direction of the elongated body and an injection, the passage configured to convey precursor to the injection port; a protruding leg attached to one end of the elongated body, the protruding leg received in a support hole formed in a module block to support the precursor injector within the module block; and an end block attached to another end of the elongated body, the end block formed with at least one screw hole to receive at least one screws for securing the end block to the module block.