发明名称 Ionisations-Vakuummesszelle
摘要 An ionization vacuum measuring cell comprises an anode (3A) and a cathode (4K) in a measuring chamber (107). The measuring chamber (107) is arranged in a housing (101) which has a vacuum-tight feedthrough (103) for a connection rod (104) of the cathode (4K) towards the outside. The measuring chamber (107) holds the rod (104) in a feedthrough (109) which is electrically insulating only. The measuring chamber (107) in the housing (101) can be exchanged by a releasable plug connection (106).
申请公布号 DE112013006774(A5) 申请公布日期 2015.12.17
申请号 DE20131106774T 申请日期 2013.07.09
申请人 INFICON GMBH 发明人 ENDERES, ROLF;WÜEST, MARTIN;UNTERMARZONER, OSKAR;STOCKER, RUDOLF;ANDREAUS, BERNHARD
分类号 G01L21/34;H01J41/06 主分类号 G01L21/34
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