An ionization vacuum measuring cell comprises an anode (3A) and a cathode (4K) in a measuring chamber (107). The measuring chamber (107) is arranged in a housing (101) which has a vacuum-tight feedthrough (103) for a connection rod (104) of the cathode (4K) towards the outside. The measuring chamber (107) holds the rod (104) in a feedthrough (109) which is electrically insulating only. The measuring chamber (107) in the housing (101) can be exchanged by a releasable plug connection (106).
申请公布号
DE112013006774(A5)
申请公布日期
2015.12.17
申请号
DE20131106774T
申请日期
2013.07.09
申请人
INFICON GMBH
发明人
ENDERES, ROLF;WÜEST, MARTIN;UNTERMARZONER, OSKAR;STOCKER, RUDOLF;ANDREAUS, BERNHARD