| 发明名称 |
SAMPLE HOLDER AND PLASMA ETCHING APPARATUS USING SAME |
| 摘要 |
A sample holder includes a substrate composed of ceramics, having a sample holding surface on one main surface thereof; and a heat-generating resistor provided on an other main surface of the substrate, containing a glass component. The substrate contains the glass component in a vicinity region of the heat-generating resistor. |
| 申请公布号 |
US2015364355(A1) |
申请公布日期 |
2015.12.17 |
| 申请号 |
US201414764228 |
申请日期 |
2014.01.30 |
| 申请人 |
KYOCERA CORPORATION |
发明人 |
KUCHIMACHI Kazuhiro |
| 分类号 |
H01L21/683 |
主分类号 |
H01L21/683 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A sample holder, comprising:
a substrate composed of ceramics, comprising a sample holding surface provided in one main surface thereof; and a heat-generating resistor provided on an other main surface of the substrate, containing a glass component, the substrate containing the glass component in a vicinity region of the heat-generating resistor. |
| 地址 |
Kyoto JP |
