HIGH CONDUCTANCE VALVE FOR FLUIDS AND VAPORS

摘要

A high conductance valve for use in fluid delivery systems is comprised of a flat non-circular orifice ridge adjacent to which a control plate having a planar control surface is proximally positioned to adjust the valve effective opening area and thereby the conductance of the valve. The length of the non-circular orifice ridge periphery is substantially greater than the circumference of a similarly sized circular orifice and therefore the realized effective opening area is also substantially greater despite having a similar footprint.

主权项

1. A valve comprising:
a valve body having a first fluid conduit opening; an orifice ridge disposed within the valve body and having a plurality of interconnected segments that form a non-circular closed circuit surrounding the first fluid conduit opening, the plurality of interconnected segments including at least one segment that curves away from the first fluid conduit opening; and a control plate having a substantially planar control surface, the control surface configured to be positioned above the orifice ridge.