Gas Flow Flange For A Rotating Disk Reactor For Chemical Vapor Deposition

摘要

A gas flow flange includes a first and a second section. The first section includes a plurality of first gas channels positioned inside and parallel to a top surface. A plurality of second gas input channels are positioned perpendicular to the top surface and extending from the top surface to the bottom surface. Each of the plurality of first gas input channels are aligned with an output of a corresponding one of the plurality of first gas input channels. The second section includes a plurality of second gas input channels that are positioned perpendicular to and extending from the top surface to the bottom surface of the second section. Each of the plurality of second gas input channels are aligned with a corresponding one of the plurality of second gas input channels. Fluid cooling conduits are positioned perpendicular to the top surface of the second section.

主权项

1. A gas flow flange for a rotating disk reactor for chemical vapor deposition, the gas flow flange comprising:
a) a first section comprising a plurality of first gas channels positioned inside and parallel to a top surface of the first section, and a plurality of second gas channels positioned perpendicular to the top surface of the first section and extending from the top surface to a bottom surface of the first section; and b) a second section comprising:
1) a plurality of first gas channels positioned perpendicular to a top surface of the second section and extending through the top surface to a bottom surface of the second section, each of the plurality of first gas channels of the second section being aligned with an output of a corresponding one of the plurality of first gas input channels in the first section;2) a plurality of second gas input channels positioned perpendicular to and extending from the top surface to the bottom surface of the second section, each of the plurality of second gas input channels being aligned with a corresponding one of the plurality of second gas input channels in the first section; and3) fluid cooling conduits that are formed in the second section and extending parallel to the top surface of the second section.