发明名称 FACET-SELECTIVE GROWTH OF NANOSCALE WIRES
摘要 Nanoscale wires, and to systems and methods of producing nanoscale wires comprising facet-specific deposition on semiconductor surfaces. A first surface of a nanoscale wire, or a semiconductor, is preferentially oxidized relative to a second surface, and material is preferentially deposited on the second surface relative to the first surface. For example, the nanoscale wire or semiconductor may be a silicon nanowire that is initially exposed to an etchant to remove silicon oxide, then exposed to an oxidant under conditions such that one facet or surface (e.g., a [ 113 ] facet) is oxidized more quickly than another facet or surface (e.g., a [ 111 ] facet). Material may then be deposited or immobilized on the less-oxidized facet relative to the more-oxidized facet. Articles are made thereby, wherein devices containing such nanoscale wires or semiconductors, kits involving such nanoscale wires or semiconductors, semiconductor surfaces, or the like.
申请公布号 WO2015191847(A1) 申请公布日期 2015.12.17
申请号 WO2015US35317 申请日期 2015.06.11
申请人 PRESIDENT AND FELLOWS OF HARVARD COLLEGE 发明人 LIEBER, CHARLES, M.;MANKIN, MAX, NATHAN;DAY, ROBERT;GAO, RUIXUAN
分类号 B82Y40/00;H01L21/302;H01L21/36;H01L29/66;H01L29/775 主分类号 B82Y40/00
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