MACRO-MICRO COMPOSITE GRATING SCALE MEASUREMENT SYSTEM BASED ON VERTICAL AND HORIZONTAL CONVERSION AMPLIFICATION

摘要

A macro-micro composite grating scale measurement system based on vertical and horizontal conversion amplification. The measurement system comprises a grating scale (1), a macro-micro reading system (2) which can conduct a relative movement relative to the grating scale (1), and a counting and image processing module, wherein the macro-micro reading system (2) directly faces a grating stripe basal plane and is disposed in parallel to the grating scale (1). The measurement system also comprises a measurement reference straight line (204a), wherein the measurement reference straight line (204a) and a grating stripe (101) acquired by an image sensor (202) are superposed in the counting and image processing module to form a superimposed image, and the measurement reference straight line (204a) and the grating stripe (101) form a certain included angle θ. By means of the structure, the measurement system can be compatible with the existing grating scales of an incremental type, an absolute type, etc., thereby having a strong applicability. The measurement system conducts macroscale displacement measurements using a high-speed low-accuracy grating scale, and acquires a reliable high-accuracy microscale displacement value using an efficient microscale reading module based on the mechanical-optical subdivision technology at the same time, thereby being suitable for grating scales having a large grating pitch size and having relatively low costs.