IMPROVED FREQUENCY-DOMAIN INTERFEROMETRIC BASED IMAGING SYSTEMS AND METHODS
摘要
Systems and methods for improved interferometric imaging are presented. One embodiment is a partial field frequency-domain interferometric imaging system in which a light beam is scanned in two directions across a sample and the light scattered from the object is collected using a spatially resolved detector. The light beam could illuminate a spot, a line or a two-dimensional area on the sample. Additional embodiments with applicability to partial field as well as other types of interferometric systems are also presented.
申请公布号
WO2015189174(A2)
申请公布日期
2015.12.17
申请号
WO2015EP62771
申请日期
2015.06.09
申请人
CARL ZEISS MEDITEC, INC.;CARL ZEISS MEDITEC AG
发明人
SCHMOLL, TILMANN;TUMLINSON, ALEXANDRE R;EVERETT, MATTHEW J.;SHEMONSKI, NATHAN