| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-speed shape measuring device by optical scanning, capable of highly accurately measuring a shape regardless of reflection characteristics of an object and adjusting measurement accuracy.SOLUTION: A shape measuring device 100 comprises optical scanning means 10 for scanning an object by slit light 1, imaging means 20 for acquiring a measurement image by reflected light of the slit light 1 from the object, and reflection position detection means 30 for calculating a reflection position of the object on the basis of the acquired measurement image. The reflection position detection means 30 calculates reflection position candidate coordinates of the object from a measurement luminance pattern distributed in a plurality of pixels constituting the acquired measurement image, compares the measurement luminance pattern with a plurality of reference luminance patterns prepared at a prescribed resolution interval within a comparison coordinate range including the reflection position candidate coordinates, calculates pattern similarity between the measurement luminance pattern and the respective reference luminance patterns, and obtains reflection position coordinates of the object from coordinate information specified by the reference luminance pattern of the highest pattern similarity. |
