SIZE-VARIABLE HEAT TREATMENT CHAMBER OF SUBSTRATES AND MANUFACTURING METHOD THEREOF, AND HEAT TREATMENT APPARATUS HAVING THE SAME

摘要

Disclosed are a size-variable substrate heat treatment chamber, a manufacturing method thereof, and a substrate heat treatment apparatus having the size-variable substrate heat treatment chamber. The size-variable substrate heat treatment chamber according to the present invention comprises: a chamber body mounted with a boat for loading and supporting upper and lower substrates therein, and supplying a heat treatment space; an upper heater housing having a plurality of upper lamp heaters therein; a lower heater housing having a plurality of lower lamp heaters therein; and one or more unit chamber bodies provided between the upper heater housing and an upper portion of the chamber body, or provided between a lower portion of the chamber body and an upper portion of the lower heater housing. At least one from the upper heater housing and the lower heater housing is detachably coupled to the chamber body so that the heat treatment space can be expanded.