减少有害物质之电浆反应器;PLASMA REACTOR FOR ABATEMENT OF HAZARDOUS MATERIAL

摘要

本发明提供一种电浆反应器，其用于在安装在制程气体朝向真空泵之排出路径上时减少该等制程气体中所包括之有害物质。;电浆反应器包括制程气体传送通过之具有管道形状的绝缘体、连接于该绝缘体面对制程腔室之前端的第一接地电极、连接于该绝缘体之后端且沿制程气体之移动方向具备面对该绝缘体内部之中心的面对部件的第二接地电极、及固定于该绝缘体之外圆周面且连接于施加AC或RF电压之电源的驱动电极。;The plasma reactor includes an insulator having a pipe shape through which process gases pass, a first ground electrode connected to a front end of the insulator facing the process chamber, a second ground electrode connected to a rear end of the insulator and provided with a facing part that faces a center of the inside of the insulator along the moving direction of process gases, and a driving electrode fixed to an external circumferential surface of the insulator and connected to a power supply applying an AC or RF voltage.