| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thickness measurement device and a thickness measurement method which can correct a measurement error in a short time even if a set position of a distance detector is displaced. <P>SOLUTION: The thickness measurement device comprises: a calibration plate 3 including a first thickness section and a second thickness section, which have reference thickness; a movement mechanism section 2 for moving a detection section 1; and a position setting section 4 for commanding movement to a "calibration position" with a constant length fixed in advance and a "measurement position" fixed in advance. The position setting section 4 delivers the "calibration" command to the movement mechanism section 2 to move the detection section 1 from the "measurement position" to the "calibration position", and delivers calibration position signals set in advance of the first thickness section and the second thickness section to a thickness arithmetic section 5. The thickness arithmetic section 5 determines each of thickness in the first thickness section and the second thickness section, determines a difference between the reference thicknesses, corrects the thickness determined at the "measurement position", fixes a thickness calibration plate, moves the detection section 1 and corrects the measurement error due to displacement of set positions of first and second distance detectors, which are set in advance. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
