用于基板处理腔室中的冷却处理工具配接器;COOLED PROCESS TOOL ADAPTER FOR USE IN SUBSTRATE PROCESSING CHAMBERS

摘要

本发明提供用于基板处理腔室中的冷却处理工具配接器之实施例。在某些实施例中，冷却处理工具配接器包括：环绕中心开口的环状主体；设置于环状主体中的冷却剂通道；利于支撑中心开口内的处理工具之一或多个特征；设置于环状主体中且与冷却剂通道流体耦接的入口与出口；与环状主体耦接的电力连接，该电力连接具有将环状主体耦接至偏压电源的一终端。; a coolant channel disposed in the annular body; one or more features to facilitate supporting a process tool within the central opening; an inlet and an outlet disposed in the annular body and fluidly coupled to the coolant channel; and a power connection coupled to the annular body having a terminal to couple the annular body to a bias power source.