VERTICAL CAPACITORS WITH SPACED CONDUCTIVE LINES

摘要

A capacitor structure comprises a first metal layer having a plurality of first horizontally-spaced neutral conductive lines horizontally positioned between a first plurality of horizontally-spaced high voltage conductive lines. The capacitor structure further comprises a second metal layer having a plurality of second horizontally-spaced neutral conductive lines horizontally positioned between a plurality of second horizontally-spaced high voltage conductive lines. The capacitor structure further comprises a third metal layer positioned vertically below the first metal layer and above the second metal layer wherein the third metal layer having a plurality of third horizontally-spaced neutral conductive lines horizontally positioned between a plurality of first horizontally-spaced low voltage conductive lines. The first low voltage lines are vertically positioned between the first and second neutral lines.