发明名称 3次元半導体装置
摘要 Three-dimensional semiconductor memory devices and methods of fabricating the same. The three-dimensional semiconductor devices include an electrode structure with sequentially-stacked electrodes disposed on a substrate, semiconductor patterns penetrating the electrode structure, and memory elements including a first pattern and a second pattern interposed between the semiconductor patterns and the electrode structure, the first pattern vertically extending to cross the electrodes and the second pattern horizontally extending to cross the semiconductor patterns.
申请公布号 JP5832114(B2) 申请公布日期 2015.12.16
申请号 JP20110071053 申请日期 2011.03.28
申请人 三星電子株式会社Samsung Electronics Co.,Ltd. 发明人 薛 光 洙;朴 贊 眞;黄 棋 鉉;崔 ハンメ;劉 東 哲;許 星 會;黄 浣 植;中西俊郎;朴 洸 ミン;李 柱 烈
分类号 H01L21/8247;H01L21/336;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8247
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