| 摘要 |
PROBLEM TO BE SOLVED: To prevent image quality from being deteriorated by influence of speckle noise. SOLUTION: The illumination optical device 12R includes a laser beam source 51, first and second condenser lenses 52a and 52b, lens holders 53a and 53b, vibration generating parts 54a and 54b, an optical integrator 57, and a relay lens 59. The vibration generating parts 54a and 54b vibrate the lens holders 53a and 53b holding the condenser lenses 52a and 52b in X and Y directions respectively. When a laser beam is radiated by energizing a laser diode 60 provided in the laser beam source 51, the radiation position of the laser beam always changes while drawing an orbit of a circle by the vibration of the condenser lenses 52a and 52b. COPYRIGHT: (C)2009,JPO&INPIT
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