| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection apparatus for inspecting the surface of a sample. SOLUTION: An apparatus for evaluating the surface of the sample comprises an electromagnetic wave irradiation device comprising an ultraviolet ray generation source 30 and a device to guide ultraviolet rays generated from the generation source to the surface of the sample S, a detector 50 which detects electrons emitted from the surface of the sample irradiated with electromagnetic waves and outputs as an electric or optical signal, and an image forming/signal processing part 60 which processes the electric or optical signal output from the detector in order to evaluate the surface of the sample. An X-ray source may be used instead of the ultraviolet source. It is also possible to prepare an apparatus which guides an electron beam generated from an electron beam source to the surface of the sample, drive any or both of the electromagnetic wave irradiation device and an electron irradiation device, and irradiate any or both of the electromagnetic waves or the electron beam to the surface of the sample. COPYRIGHT: (C)2009,JPO&INPIT
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