CARBON NANOTUBE BASED GAS SENSOR AND OPERATING METHOD THEREOF

摘要

A carbon nanotube based gas sensor and operating method thereof is provided to reduce the time when gas molecule is detached at room temperate and detect the kind of gas according to ingredient by supplying a gate voltage pulse into a silicon substrate of a gas sensor. A carbon nanotube based gas sensor comprises a silicon substrate in which a silicon oxide film(4) is laminated; a metal pattern(16) laminated on the top of the silicon oxide film; a carbon nanotube equipped between one side of the metal pattern and one side of adjacent metal pattern; a source electrode(10) connected to either side of the carbon nanotube and laminated on it, and a drain electrode(12) and a gate electrode(14) supplying a gate voltage pulse, connected to the silicon substrate.