| 摘要 |
PROBLEM TO BE SOLVED: To provide an aberration compensation method of a transmission electron microscope capable of providing a high-definition image by eliminating influence of hysteresis of a lens by lens relaxation, in relation to an aberration compensation method of a transmission electron microscope. SOLUTION: A transmission electron microscope with an irradiation system Cs collector mounted thereon is structured such that, when a mode is changed from a TEM system to an STEM system, a lens relaxation treatment by a predetermined frequency to gradually reduce the amplitude thereof to positive and negative sides centering a predetermined value is executed to a lens constituting the transmission electron microscope. COPYRIGHT: (C)2009,JPO&INPIT
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