发明名称 PROCESSING DEVICE AND CONVEYING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a processing device capable of performing a plurality of processes to be performed while continuously conveying a flexible film with a short TAT. SOLUTION: The processing device for successively performing a plurality of processes for a flexible film 1 to be continuously conveyed comprises a conveying mechanism 13 for continuously conveying the flexible film 1, a first processing unit 11 for performing the first process for the flexible film 1, a second processing unit 12 for performing the second process for the flexible film 1, and a buffer mechanism 14 for performing the buffering of the flexible film 1 according to the differential conveying speed of the flexible film 1 to be generated between the first processing unit 11 and the second processing unit 12. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009001376(A) 申请公布日期 2009.01.08
申请号 JP20070163764 申请日期 2007.06.21
申请人 TOKYO ELECTRON LTD 发明人 KAWAUCHI TAKUO
分类号 B65H23/188;B05C13/00;B65H20/34;H01L51/50;H05B33/10 主分类号 B65H23/188
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