MEMS DEVICES HAVING IMPROVED UNIFORMITY AND METHODS FOR MAKING THEM
摘要
Disclosed is a microelectromechanical system (MEMS) device and method of manufacturing the same. In one aspect, MEMS such as an interferometric modulator include one or more elongated interior posts and support rails supporting a deformable reflective layer, where the elongated interior posts are entirely within an interferometric cavity and aligned parallel with the support rails. In another aspect, the interferometric modulator includes one or more elongated etch release holes formed in the deformable reflective layer and aligned parallel with channels formed in the deformable reflective layer defining parallel strips of the deformable reflective layer.
申请公布号
WO2009006162(A2)
申请公布日期
2009.01.08
申请号
WO2008US68205
申请日期
2008.06.25
申请人
QUALCOMM MEMS TECHNOLOGIES, INC.;HEALD, DAVID, L.;ZHONG, FAN;FLOYD, PHILIP, DON