| 摘要 |
<p>The device has a treatment chamber (1), and a workpiece carrier (2) arranged in the chamber. A nozzle device (4) is arranged in the treatment chamber and includes a set of nozzle units (5). Each nozzle unit exhibit a nozzle and a nozzle actuator e.g. piezo-electric actuator, that is coupled to the nozzle. The workpiece carrier is rotatable in the treatment chamber and/or the nozzle units are movable around the workpiece carrier. The nozzle device has a nozzle pipe (41), where the nozzle units are arranged at the nozzle pipe. The nozzle units are arranged at a wall of the treatment chamber.</p> |
