TEMPERATURE CONTROL METHOD FOR CHILLER APPARATUS

摘要

PURPOSE: A temperature control method for a chiller apparatus is provided to prevent damage to a wafer and low production yield due to high temperatures by controlling the temperature of a electrode plate and a chamber constantly. CONSTITUTION: A caloric value of a brine pump is calculated(S31). The minimum power amount of the brine heater is set(S32). The cooling control set value is calculated based on the minimum power amount of the heater(S33). The expansion valve installed at an evaporator is controlled based on the cooling control set value and the cooling control of the brine is performed(S34). The heating compensation output control of the cold-controlled brine is performed by the set heater minimum power amount of the heater(S35).