| 摘要 |
PURPOSE: A peeling apparatus and an organic film forming apparatus having a peeling apparatus and a peeling method are provided to improve the efficiency of stripping by using stripping units for a mask and substrate. CONSTITUTION: A peeling apparatus(400A) for a mask comprises a first plate, a holding member, and a plurality of first pins. The first plate is arranged in the opposite side of the holding stage. A pressing member presses a first plate in a first timing. A plurality of first pins are fixed to the first plate. The peeling apparatus(400B) for the substrate comprises a second plate, the pressing member, and a plurality of second pins. The second plate is adjacent to the first plate. The pressing member presses the second plate in a second timing. A plurality of second pins are fixed to the second plate.
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