METHOD OF COMPARATIVE ASSESSMENT RELIABILITY OF BATCHES OF SEMICONDUCTOR PRODUCTS

摘要

FIELD: physics; semiconductors. ^ SUBSTANCE: invention relates to microelectronics and specifically to methods of ensuring quality and reliability of semiconductor devices and can be used for comparative assessment of reliability of batches of semiconductor devices at the manufacturing stage and incoming inspection at radio-electronic equipment manufacturing enterprises. Mechanical tests and exposure to electrostatic discharges are carried out at maximum permissible values under technical conditions, and reliability of batches of semiconductor devices compared by comparing minimum, medium and maximum values of the information-bearing parametre before and after tests. ^ EFFECT: improved values of information-bearing parametres and increased reliability. ^ 1 tbl