| 发明名称 |
PLASMA-PROCESSING DEVICE AND METHOD OF MANUFACTURING ADHESION-PREVENTING MEMBER |
| 摘要 |
<p>A plasma processing apparatus of the present invention performs on a substrate to be processed, plasma processing with a noble metal material and a ferroelectric material and is provided with a constituent member that is exposed to plasma while being heated. The constituent member is formed with an aluminum alloy of at least 99% aluminum purity.</p> |
| 申请公布号 |
EP2151855(A1) |
申请公布日期 |
2010.02.10 |
| 申请号 |
EP20080752721 |
申请日期 |
2008.05.14 |
| 申请人 |
ULVAC, INC. |
发明人 |
KOKAZE, YUTAKA;UEDA, MASAHISA;ENDOU, MITSUHIRO;SUU, KOUKOU;MIYAZAKI, TOSHIYA;SAKATA, GENJI;NAKAMURA, TOSHIYUKI |
| 分类号 |
H01J37/32;H01L21/3065;H05H1/46 |
主分类号 |
H01J37/32 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
