发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
<p>PURPOSE: A semiconductor device and a method for manufacturing the same are provided to improve the electrical property of forming a gate insulation layer and a semiconductor film consecutively without the exposure to the air. CONSTITUTION: A gate insulation layer(102) is formed on a gate electrode layer(101). A semiconductor layer(103) is formed on the gate insulation layer. The first and second buffer layers(104a,104b) are formed on the semiconductor layer. A source electrode layer(105a) is formed on the first buffer layer. A drain electrode layer(105b) is formed on the second buffer layer. The first and the second buffer layer comprise a metal oxide, and a first and a second buffer layer have the n type conductivity.</p> |
申请公布号 |
KR20100014164(A) |
申请公布日期 |
2010.02.10 |
申请号 |
KR20090070385 |
申请日期 |
2009.07.31 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
YAMAZAKI SHUNPEI;MIYAIRI HIDEKAZU;AKIMOTO KENGO;SHIRAISHI KOJIRO |
分类号 |
H01L29/786;G02F1/136 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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