A FORWARD AND REVERSE DEVICE OF VACUUM TRANSFER ARM

摘要

PURPOSE: A forward and reverse device of a vacuum transfer arm is provided to prevent the leakage of magnetic fluid to the outside due to pressure difference by installing a filter near a communicating hole. CONSTITUTION: A body(10) includes a pair of protrusions(12) in which a support protrusion is formed. A bearing member(20) has a lower part of an inner ring supported by the support protrusion. An inner ring fastening plate(30) is combined with each protrusion and fixes the inner ring of the each bearing. A gear link plate(40) has a gear link protruded from the one side of the body and has a gear unit. A magnetic fluid room(50) closes tightly a space between a lower part of a gear link plate and an upper part of body. A cover is formed on the gear link plate and is combined with the body.