| 摘要 |
An analysis apparatus includes an assignor assigning a physical property value corresponding to the kind of a material to each of regions formed by dividing a structural data representing a structure of a multilayer substrate, a determiner determining whether or not the each of the region belongs to a predetermined region in a layer of a predetermined kind, and a physical property value changer changing the physical property value of the region belonging to a predetermined region in a layer of a predetermined kind.
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