<p>Embodiments described herein relate to a track system in a polishing system. One embodiment described herein provides a track system configured to transfer polishing heads in a polishing system. The track system comprises a supporting frame, a track coupled to the supporting frame and defining a path along which the polishing heads are configured to move, and one or more carriages configured to carry at least one polishing head along the path defined by the track, wherein the one or more carriages are coupled to the track and independently movable along the track.</p>
申请公布号
WO2009126823(A3)
申请公布日期
2010.01.28
申请号
WO2009US40099
申请日期
2009.04.09
申请人
APPLIED MATERIALS, INC.;YILMAZ, ALPAY;D'AMBRA, ALLEN, L.;RANGARAJAN, JAGAN;KARUPPIAH, LAKSHMANAN;TEPMAN, AVI
发明人
YILMAZ, ALPAY;D'AMBRA, ALLEN, L.;RANGARAJAN, JAGAN;KARUPPIAH, LAKSHMANAN;TEPMAN, AVI