发明名称 METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM
摘要 According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a hard mask and a resist on a magnetic recording layer, imprinting a stamper on the resist to transfer patterns of protrusions and recesses, removing resist residues left in the recesses of the patterned resist, etching the hard mask using the patterned resist as a mask to transfer the patterns of protrusions and recesses, stripping the resist, and performing ion beam etching to remove the remaining hard mask and to modify a surface of the magnetic recording layer uncovered with the remaining hard mask.
申请公布号 US2010018946(A1) 申请公布日期 2010.01.28
申请号 US20090508269 申请日期 2009.07.23
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 ISOWAKI YOUSUKE;KIMURA KAORI;KAMATA YOSHIYUKI;SAKURAI MASATOSHI
分类号 G11B3/70 主分类号 G11B3/70
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