发明名称 |
Method and Apparatus for Nano Probing a Semiconductor Chip |
摘要 |
Various methods and apparatus for electrically probe testing a semiconductor chip with circuit perturbation are disclosed. In one aspect, a method of testing is provided that includes contacting a first nano probe to a conductor structure on a first side of a semiconductor chip. The semiconductor chip has plural circuit structures. A external stimulus is applied to a selected portion of the first side of the semiconductor chip to perturb at least one of the plural circuit structures. The semiconductor chip is caused to perform a test pattern during the application of the external stimulus. An electrical characteristic of the semiconductor chip is sensed with the first nano probe during performance of the test pattern.
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申请公布号 |
US2010019786(A1) |
申请公布日期 |
2010.01.28 |
申请号 |
US20080180989 |
申请日期 |
2008.07.28 |
申请人 |
POTOK RONALD M;DABNEY GREGORY A;YASSINE ABDULLAH M |
发明人 |
POTOK RONALD M.;DABNEY GREGORY A.;YASSINE ABDULLAH M. |
分类号 |
G01R1/067;G01R31/26 |
主分类号 |
G01R1/067 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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