| 摘要 |
The plasma arrangement has two electrically conducting electrodes, between which a voltage is applied and a plasma discharge is produced. Units are provided for supplying work gas into the area of plasma discharge. The former electrode is formed as cone electrode (16) and the later electrode is formed as base plate (3) with a cone opening (17) corresponding to the cone electrode. The cone electrode is moved axially perpendicular to base plate in the cone opening. |
