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发明名称
Gegenstand aus einem Keramikmaterial mit geringer thermischer Ausdehnung und seine Verwendung
摘要
申请公布号
DE19861434(B4)
申请公布日期
2010.01.28
申请号
DE1998161434
申请日期
1998.10.26
申请人
KYOCERA CORP.;NIKON CORP.
发明人
SECHI, YOSHIHISA;SATO, MASAHIRO;AIDA, HIROSHI;KOHSAKA, SHOJI;HAYASHI, YUTAKA
分类号
C04B35/195;H01L21/67;H01L23/15
主分类号
C04B35/195
代理机构
代理人
主权项
地址
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