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发明名称
EPITAXIAL DEPOSITION REACTOR
摘要
申请公布号
US3491720(A)
申请公布日期
1970.01.27
申请号
USD3491720
申请日期
1965.07.29
申请人
MONSANTO CO.
发明人
DARREL M. HARRIS
分类号
C30B25/08;H01L21/20;(IPC1-7):C23C13/08
主分类号
C30B25/08
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