| 摘要 |
<p>A pressure sensor comprising a vibrating microassembly fastened to a supporting base, a control device for said assembly to make it oscillate relative to said supporting base at known frequency and amplitude, and means for detecting the deviations of the frequency and/or amplitude of said oscillation of said assembly from said known frequency and/or amplitude, wherein said control device is driven by a constant frequency signal, and wherein said detection means allow a direct detection of said deviations, for instance by optical or electrical means.
</p> |
