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发明名称
摘要
申请公布号
JP4403919(B2)
申请公布日期
2010.01.27
申请号
JP20040234961
申请日期
2004.08.12
申请人
发明人
分类号
H01L21/3065;H01J37/32;H05H1/46
主分类号
H01L21/3065
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