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发明名称
PROCESS FOR PRODUCING SILICON CARBIDE SEMICONDUCTOR DEVICE
摘要
申请公布号
EP1933386(A4)
申请公布日期
2010.01.27
申请号
EP20060797281
申请日期
2006.09.01
申请人
CENTRAL RESEARCH INSTITUTE OF ELECTRIC POWER INDUSTRY
发明人
MIYANAGI, TOSHIYUKI;TSUCHIDA, HIDEKAZU;KAMATA, ISAHO;NAGANO, MASAHIRO;SUGAWARA, YOSHITAKA;NAKAYAMA, KOJI;ISHII, RYOSUKE
分类号
H01L29/861;H01L21/18;H01L21/329;H01L29/24
主分类号
H01L29/861
代理机构
代理人
主权项
地址
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