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发明名称
METHOD AND APPARATUS FOR MEASURING THIN FILM SAMPLE
摘要
申请公布号
EP1843126(B1)
申请公布日期
2009.12.09
申请号
EP20050820171
申请日期
2005.12.22
申请人
SII NANOTECHNOLOGY INC.
发明人
IKKU, YUTAKA;ASAHATA, TATSUYA;SUZUKI, HIDEKAZU
分类号
G01B15/02;G01N23/20;G01N23/225;H01J37/28;H01J37/30;H01L21/66
主分类号
G01B15/02
代理机构
代理人
主权项
地址
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