| 摘要 |
<p>A method and apparatus is described that allows the width of fine line structures ablated or cured by a focussed laser beam on the surface of flat substrates to be changed while the beam is in motion over the substrate surface while simultaneously maintaining the beam focal point accurately on the surface. The method allows different focal spot diameters and different ablated or cured line widths to be rapidly selected and ensures that the beam shape in the focal spot remains constant and the depth of focus is always maximized. It achieves this by changing movable elements in the optical system in response to measurements of the distance from the substrate surface to the focusing lens.</p> |
