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发明名称
摘要
申请公布号
JP4380391(B2)
申请公布日期
2009.12.09
申请号
JP20040104770
申请日期
2004.03.31
申请人
发明人
分类号
C30B29/18;G02B5/18;G02B5/30;G02B27/18;G03F7/20;H01L21/027
主分类号
C30B29/18
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