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发明名称
PROCESS FOR GROWING COMPOUND SEMICONDUCTOR SINGLE CRYSTAL
摘要
申请公布号
JPS6131384(A)
申请公布日期
1986.02.13
申请号
JP19840151277
申请日期
1984.07.23
申请人
SHOWA DENKO KK
发明人
SATO TAKAYUKI
分类号
C30B27/02;C30B15/20;H01L21/02;H01L21/208
主分类号
C30B27/02
代理机构
代理人
主权项
地址
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