Coriolis mass flow controller

摘要

A Coriolis mass flow controller comprises a flow sensor tube, a drive device situated relative to the flow sensor tube so as to cause the flow sensor tube to vibrate, a position sensing device situated relative to the flow sensor tube so as to measure the twist in the flow sensor tube due to Coriolis force and a flow control device adapted to receive fluid from the flow sensor tube. The flow control device may comprise a valve including a valve seat and a plunger adapted to seal against the valve seat. The plunger may define at least one hole extending therethrough so as to establish a fluid flow path through the plunger when the plunger is unseated from the valve seat.